A review of MEMS vibrating gyroscopes and their reliability issues in harsh environments

WA Gill, I Howard, I Mazhar, K McKee - Sensors, 2022 - mdpi.com
Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of
attention over the last two decades because of their low power consumption, easy …

Frequency-modulated mems gyroscopes: A review

X Ren, X Zhou, S Yu, X Wu, D Xiao - IEEE sensors journal, 2021 - ieeexplore.ieee.org
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

Overview and analysis of MEMS Coriolis vibratory ring gyroscope

J Jia, X Ding, Z Qin, Z Ruan, W Li, X Liu, H Li - Measurement, 2021 - Elsevier
Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

Fully differential single resonator FM gyroscope using CW/CCW mode separator

T Tsukamoto, S Tanaka - Journal of Microelectromechanical …, 2018 - ieeexplore.ieee.org
This paper reports a fully differential frequency modulated (FM) gyroscope where the
superposed clockwise (CW) and counter clockwise (CCW) modes are independently …

High scale-factor stability frequency-modulated MEMS gyroscope: 3-axis sensor and integrated electronics design

P Minotti, S Dellea, G Mussi, A Bonfanti… - IEEE Transactions …, 2017 - ieeexplore.ieee.org
This paper reports the developments toward an integrated, tri-axial, frequency-modulated,
consumergrade, and microelectromechanical system (MEMS) gyroscope. A custom low …

Rate integrating gyroscope using independently controlled CW and CCW modes on single resonator

T Tsukamoto, S Tanaka - Journal of Microelectromechanical …, 2020 - ieeexplore.ieee.org
This paper reports a rate integrating gyroscope (RIG) using independently controlled
clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The …

A digital control structure for Lissajous frequency-modulated mode MEMS gyroscope

X Wang, X Zheng, Y Shen, C Xia, G Liu… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
This article proposes a digital control structure for a doubly decoupled gyroscope working in
the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops …

Fully-differential single resonator FM/whole angle gyroscope using CW/CCW mode separator

T Tsukamoto, S Tanaka - 2017 IEEE 30th International …, 2017 - ieeexplore.ieee.org
This paper reports a fully-differential frequency modulated (FM) gyroscope where
superposed clockwise (CW) and counter clockwise (CCW) modes are independently …

Quality factor trimming method using thermoelastic dissipation for multi-ring resonator

H Abdelli, T Tsukamoto, S Tanaka - Sensors and Actuators A: Physical, 2021 - Elsevier
In this paper, a novel quality factor trimming method for a 2-axis mode-matched resonator
using thermoelastic dissipation (TED) is reported. A disk resonator was designed so that the …

Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation

X Zheng, X Wang, Y Shen, C Xia, W Tong… - Journal of …, 2023 - iopscience.iop.org
We report for the first time an implementable method to identify and suppress the driving
force misalignment angle for a MEMS gyroscope working either in amplitude modulated …