Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling
This study investigates the impact of vapour-phase precursor flow rates—specifically those
of trimethylaluminum (TMA) and deionized water (H2O)—on the deposition of aluminum …
of trimethylaluminum (TMA) and deionized water (H2O)—on the deposition of aluminum …
Enhancing Carbon Fiber Fabrics with ALD AlxOy Coatings: An Investigation of Thickness Effects on Weight, Morphology, Coloration, and Thermal Properties
This study explores the impact of non-stoichiometric aluminum oxide (AlxOy) coatings
applied via thermal atomic layer deposition (ALD) on carbon fiber fabrics (CFFs) …
applied via thermal atomic layer deposition (ALD) on carbon fiber fabrics (CFFs) …
Enhancing Carbon Fiber Fabrics with ALD Al x O y Coatings: An Investigation of Thickness Effects on Weight, Morphology, Coloration, and Thermal Properties.
This study explores the impact of non-stoichiometric aluminum oxide (Al< sub> x O< sub> y)
coatings applied via thermal atomic layer deposition (ALD) on carbon fiber fabrics (CFFs) …
coatings applied via thermal atomic layer deposition (ALD) on carbon fiber fabrics (CFFs) …