Over the last two decades, piezoelectric resonant sensors based on micro- electromechanical systems (MEMS) technologies have been extensively studied as such …
G Wu, J Xu, EJ Ng, W Chen - Journal of …, 2020 - ieeexplore.ieee.org
An overview of microelectromechanical systems (MEMS) resonators for frequency reference and timing applications is presented. The progress made in the past few decades in design …
Nanoscale modal confinement is known to radically enhance the effect of intrinsic Kerr and Raman nonlinearities within nanophotonic silicon waveguides. By contrast, stimulated …
Stimulated Brillouin scattering (SBS) is traditionally viewed as a process whose strength is dictated by intrinsic material nonlinearities with little dependence on waveguide geometry …
Z Qin, X Ding, X Ge, Z Ruan, H Li - International Journal of Mechanical …, 2022 - Elsevier
Mode properties and thermoelastic damping (TED) are crucial for the disk resonator gyroscope (DRG). Most of the DRG structure designs do not involve the mode order …
P Li, Y Fang, R Hu - Journal of Sound and Vibration, 2012 - Elsevier
Predicting thermoelastic damping (TED) is crucial in the design of high Q micro-electro- mechanical systems (MEMS) resonators. In the past, some analytical models have been …
W Zuo, P Li, J Du, ZTH Tse - International Journal of Heat and Mass …, 2022 - Elsevier
In this paper, an analytical model for thermoelastic damping in an anisotropic piezoelectric microbeam is investigated based on the thermal energy approach. The charge in the …
Thermally excited and piezoresistively detected bulk-micromachined cantilevers vibrating in their in-plane flexural resonance mode are presented. By shearing the surrounding fluid …
M Weinberg, R Candler, S Chandorkar… - … Solid-State Sensors …, 2009 - ieeexplore.ieee.org
In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality …