Mesoscopic physics of nanomechanical systems

A Bachtold, J Moser, MI Dykman - Reviews of Modern Physics, 2022 - APS
Nanomechanics has brought mesoscopic physics into the world of vibrations. Because
nanomechanical systems are small, fluctuations are significant, the vibrations already …

Dissipation analysis methods and Q-enhancement strategies in piezoelectric MEMS laterally vibrating resonators: A review

C Tu, JEY Lee, XS Zhang - Sensors, 2020 - mdpi.com
Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

MEMS resonators for frequency reference and timing applications

G Wu, J Xu, EJ Ng, W Chen - Journal of …, 2020 - ieeexplore.ieee.org
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

[HTML][HTML] Tailorable stimulated Brillouin scattering in nanoscale silicon waveguides

H Shin, W Qiu, R Jarecki, JA Cox, RH Olsson… - Nature …, 2013 - nature.com
Nanoscale modal confinement is known to radically enhance the effect of intrinsic Kerr and
Raman nonlinearities within nanophotonic silicon waveguides. By contrast, stimulated …

Giant enhancement of stimulated Brillouin scattering in the subwavelength limit

PT Rakich, C Reinke, R Camacho, P Davids, Z Wang - Physical Review X, 2012 - APS
Stimulated Brillouin scattering (SBS) is traditionally viewed as a process whose strength is
dictated by intrinsic material nonlinearities with little dependence on waveguide geometry …

A mode order optimized disk resonator gyroscope considering thermoelastic damping

Z Qin, X Ding, X Ge, Z Ruan, H Li - International Journal of Mechanical …, 2022 - Elsevier
Mode properties and thermoelastic damping (TED) are crucial for the disk resonator
gyroscope (DRG). Most of the DRG structure designs do not involve the mode order …

Thermoelastic damping in rectangular and circular microplate resonators

P Li, Y Fang, R Hu - Journal of Sound and Vibration, 2012 - Elsevier
Predicting thermoelastic damping (TED) is crucial in the design of high Q micro-electro-
mechanical systems (MEMS) resonators. In the past, some analytical models have been …

Thermoelastic damping in anisotropic piezoelectric microbeam resonators

W Zuo, P Li, J Du, ZTH Tse - International Journal of Heat and Mass …, 2022 - Elsevier
In this paper, an analytical model for thermoelastic damping in an anisotropic piezoelectric
microbeam is investigated based on the thermal energy approach. The charge in the …

Thermal excitation and piezoresistive detection of cantilever in-plane resonance modes for sensing applications

LA Beardslee, AM Addous, S Heinrich… - Journal of …, 2010 - ieeexplore.ieee.org
Thermally excited and piezoresistively detected bulk-micromachined cantilevers vibrating in
their in-plane flexural resonance mode are presented. By shearing the surrounding fluid …

Energy loss in MEMS resonators and the impact on inertial and RF devices

M Weinberg, R Candler, S Chandorkar… - … Solid-State Sensors …, 2009 - ieeexplore.ieee.org
In this paper, we review the current understanding of energy loss mechanisms in
micromachined (MEMS and NEMS) devices. We describe the importance of high quality …