Atom probe tomography
Atom probe tomography (APT) provides three-dimensional compositional mapping with sub-
nanometre resolution. The sensitivity of APT is in the range of parts per million for all …
nanometre resolution. The sensitivity of APT is in the range of parts per million for all …
Laser-Assisted Field Evaporation of Chromia with Deep Ultraviolet Laser Light
S Jakob, A Fazi, M Thuvander - Microscopy and Microanalysis, 2024 - academic.oup.com
In this work, samples of chromia (Cr2O3) scale have been prepared for atom probe
tomography and field evaporated with deep ultraviolet laser light (258 nm wavelength). The …
tomography and field evaporated with deep ultraviolet laser light (258 nm wavelength). The …
Ion generation by photoionization and photofield tunneling of electrons during atom probe tomography of thermally grown chromia with deep UV laser light
S Jakob, D Mayweg, M Thuvander - arXiv preprint arXiv:2411.01913, 2024 - arxiv.org
The evaporation mechanisms during laser-assisted field evaporation of thermally grown
chromia is investigated with the newest generation of commercial atom probe tomography …
chromia is investigated with the newest generation of commercial atom probe tomography …
Atom probe tomography using an extreme ultraviolet trigger pulse
Atom probe tomography (APT) is a powerful materials characterization technique capable of
measuring the isotopically resolved three-dimensional (3D) structure of nanoscale …
measuring the isotopically resolved three-dimensional (3D) structure of nanoscale …
[图书][B] Report from the extreme ultraviolet (EUV) lithography working group meeting: Current state, needs, and path forward
This is the report of a hybrid working group meeting held on April 25, 2023, at the National
Institute of Standards and Technology (NIST) in Boulder, CO. The working group was …
Institute of Standards and Technology (NIST) in Boulder, CO. The working group was …
[HTML][HTML] Effects of laser wavelength and pulse energy on the evaporation behavior of TiN coatings in atom probe tomography: A multi-instrument study
The impact of the laser wavelength on accuracy in elemental composition analysis in atom
probe tomography (APT) was investigated. Three different commercial atom probe systems …
probe tomography (APT) was investigated. Three different commercial atom probe systems …
Fabrication of specimens for atom probe tomography using a combined gallium and neon focused ion beam milling approach
We demonstrate a new focused ion beam sample preparation method for atom probe
tomography. The key aspect of the new method is that we use a neon ion beam for the final …
tomography. The key aspect of the new method is that we use a neon ion beam for the final …
Evaporation-field differences with deep-UV atom probe tomography
T Prosa, D Lenz, I Martin, D Reinhard… - Microscopy and …, 2021 - cambridge.org
Pulsed-laser atom probe tomography (PLAP) has been shown to be a thermally-activated
fieldevaporation process [1]. The first PLAP investigations were performed in the 1970s and …
fieldevaporation process [1]. The first PLAP investigations were performed in the 1970s and …
Extreme ultraviolet radiation pulsed atom probe tomography of iii-nitride semiconductor materials
L Miaja-Avila, BW Caplins… - The Journal of …, 2021 - ACS Publications
Laser-pulsed atom probe tomography (LAPT) is a materials characterization technique that
has been widely applied in the study and characterization of III-nitride semiconductors. To …
has been widely applied in the study and characterization of III-nitride semiconductors. To …
Behavior of the ε-Ga2O3:Sn Evaporation During Laser-Assisted Atom Probe Tomography
F Chabanais, E Di Russo, A Karg… - Microscopy and …, 2021 - academic.oup.com
The measurement of the composition of ε-Ga2O3 and the quantification of Sn doping in ε-
Ga2O3: Sn by laser-assisted atom probe tomography (APT) may be inaccurate depending …
Ga2O3: Sn by laser-assisted atom probe tomography (APT) may be inaccurate depending …