ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators
This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) based on
30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC), operating near …
30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC), operating near …
Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication
This work reports on the modeling, fabrication, and experimental characterization of a 13
GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator …
GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator …
Characterization of Acoustic Losses in Interdigitated VHF to mmWave Piezoelectric M/NEMS Resonators
This work reports on a technology-agnostic and frequency-independent methodology
combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the …
combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the …
36.8-GHz Fin-Mounted Lithium Niobate Resonator with High Electromechanical Coupling Coefficient of 33.8%
In this study, we carefully reduced the thickness of single-crystal Y128° lithium niobate (LN)
thin films to approximately 50 nm through low-power physical etching using argon gas. This …
thin films to approximately 50 nm through low-power physical etching using argon gas. This …
8-25 GHz Broadband Experimental Quality Factor Extraction of 30% ScAlN with Acoustic Delay Lines
This work reports on the first experimental characterization of the Quality Factor (Q) of the
Cross-sectional Lamé Mode (CLM) in 30% sC-doped Aluminum Nitride (ScAlN) above the X …
Cross-sectional Lamé Mode (CLM) in 30% sC-doped Aluminum Nitride (ScAlN) above the X …