Characterization of microvoids in thin hydrogenated amorphous silicon layers by spectroscopic ellipsometry and Fourier transform infrared spectroscopy

W Liu, L Zhang, F Meng, W Guo, J Bao, J Liu, D Wang… - Scripta Materialia, 2015 - Elsevier
Microstructures of voids in a-Si: H layers on the surface of c-Si wafers were quantitatively
analyzed by combining spectroscopic ellipsometry and Fourier transform infrared …

Study on the role of filament temperature on growth of indium-catalyzed silicon nanowires by the hot-wire chemical vapor deposition technique

SK Chong, BT Goh, CF Dee, SA Rahman - Materials Chemistry and …, 2012 - Elsevier
Silicon nanowires (SiNWs) were synthesized from indium catalysts on the Si (111) substrate
using the hot-wire chemical vapor deposition technique. A tungsten filament with purity of …

Effect of silane flow rate on structural, electrical and optical properties of silicon thin films grown by VHF PECVD technique

J Gope, S Kumar, S Sudhakar, CMS Rauthan… - Materials Chemistry and …, 2013 - Elsevier
Hydrogenated silicon thin films deposited by VHF PECVD process for various silane flow
rates have been investigated. The silane flow rate was varied from 5 sccm to 30 sccm …

Exploring the photo paper as flexible substrate for fabrication of a-Si: H based thin film solar cells at low temperature (110° C): Influence of radio frequency power on …

R Madaka, V Kanneboina, P Agarwal - Thin Solid Films, 2018 - Elsevier
The effect of variation of radio frequency (rf) power on the structural, optical and electronic
properties of intrinsic hydrogenated amorphous silicon (a-Si: H) films deposited at very low …

Synthesis of nanocrystalline silicon thin films using the increase of the deposition pressure in the hot-wire chemical vapour deposition technique

S Halindintwali, D Knoesen, R Swanepoel… - South African Journal …, 2009 - journals.co.za
Nanostructured thin silicon-based films have been deposited using the hot-wire chemical
vapour deposition (HWCVD) technique at the University of the Western Cape. A variety of …

[图书][B] Amorphous silicon solar cells obtained by hot-wire chemical vapour deposition

D Soler Vilamitjana - 2004 - diposit.ub.edu
The photovoltaic conversion of sun light energy into electricity constitutes a viable, clean and
renewable alternative for electric energy production. A wide variety of different materials …

[图书][B] Effects of nanocrystalline silicon inclusions in doped and undoped thin films of hydrogenated amorphous silicon

CP Blackwell - 2009 - search.proquest.com
Hydrogenated amorphous silicon has attracted considerable interest as a low-cost material
for various large-area electronic devices, such as scanners, thin film transistors employed in …

Structural and optical properties of the a-Si: H thin films irradiated by high energetic electron beams

W Liu, X Jiang, W Li, J Wang, X Lian, Y Zeng… - Journal of Materials …, 2016 - Springer
Hydrogenated amorphous silicon (a-Si: H) films deposited on quartz substrate by radio-
frequency plasma enhanced chemical vapour deposition were irradiated by an high …

Electronic transport in nanocrystalline germanium/hydrogenated amorphous silicon composite thin films

KE Bodurtha - 2015 - search.proquest.com
Recent interest in composite materials based on hydrogenated amorphous silicon (a-Si: H)
stems in part from its potential for technical applications in thin film transistors and solar …

[引用][C] 钟罩式硅烷反应器内流动与传热的数值模拟

黄国强, 王乃治, 潘金花 - 人工晶体学报, 2014