PECVD deposition and characterization of silicon oxynitride for optical applications
Silicon oxynitride (SiON) films have been found to possess extremely useful properties for
optical applications. In optoelectronics, a major advantage of this material is the ability to …
optical applications. In optoelectronics, a major advantage of this material is the ability to …
Novel optical-waveguide sensing platform based on input grating coupler
S Grego, S Naskar, AM Patel… - … and Technologies X, 2006 - spiedigitallibrary.org
Silicon oxynitride optical waveguides with a grating coupler were used for a label-free
detection approach that measures the change of refractive index at the grating surface. Two …
detection approach that measures the change of refractive index at the grating surface. Two …