P Janus, A Sierakowski, P Grabiec, M Rudek… - Microelectronic …, 2017 - Elsevier
In this paper we present the design, technology and application of Si/Si3N4 micro calibration stage equipped with Pt microheaters. This 500 nm thick MEMS structure with 4 …
TP Nguyen, L Thiery, D Teyssieux… - Journal of Physics …, 2017 - iopscience.iop.org
The scanning thermal microscope (SThM) has become a versatile tool for local surface temperature mapping or measuring thermal properties of solid materials. In this article, we …
We report on a micro-hotplate technology platform optimized for the calibration of Scanning Thermal Microscopy probes (SThM) used in surface temperature measurement mode. The …