This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

This paper reviews the state of the art knowledge related to critical failure mechanisms in
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …

A new concept concerning dielectric engineering is presented in this study aiming at a net
improvement of the performance of dielectric layers in RF MEMS capacitive switches with …

The long-term reliability of MEMS devices related to the dielectric charging phenomenon is
one of the main hurdles in the commercialization of these devices. This paper presents a …

In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

Stiction is one of the major reliability issues limiting practical application of nano-electro-
mechanical systems (NEMS), an emerging device technology that exploits mechanical …

Charge transport in insulating composites is fundamental to designing high performance in
electrical breakdown strength processes. A fundamental understanding of the charge …

To understand the physical phenomena occurring at metal/dielectric interfaces,
determination of the charge density profile at nanoscale is crucial. To deal with this issue …

This article presents the design, realization and measurement of thin-film packaged RF-
MEMS switched capacitors for millimeter-wave applications. Packaging is included in the …

Results from a study on the charging effect of a-SiO x N y: H thin layers are presented in this
paper. Issues related to structural and electrical characterization of these layers are …