An overview is given of recent developments in laser diagnostic methods for the quantitative
measurement of trace species concentrations and, in conjunction, of temperature in …

Atomic hydrogen is found to simultaneously passivate and depassivate silicon dangling
bonds at the Si (11 l)/SiOz interface at room temperature via the reactions P6+ Ho-P&I and …

Radical species, including atomic hydrogen, play an important role in the CVD process to
prepare high‐quality thin solid films. Detailed information on the absolute densities of these …

We describe laser and mass spectroscopic methods, and related modelling studies, that
have been used to unravel details of the gas phase chemistry involved in diamond chemical …

There is presently a considerable effort to understand the chemistry of diamond film growth
by chemical‐vapor deposition. The first measurements of reaction kinetics between diamond …

A two-dimensional model of a hot-filament (HF) CVD reactor has been developed to study
the gas-phase and surface processes of diamond growth. Full transport equations were …

The computational fluid dynamics (CFD) modeling on the hot filament chemical vapor
deposition (HFCVD) process used to produce a diamond film has been conducted to …

Modulated‐beam mass spectrometry and x‐ray photoelectron spectroscopy (XPS) have
been used to investigate the interaction of CH4, C2H4, C5H10, and H2 with carburized and …

We report here a direct measurement of the spatially resolved atomic hydrogen
concentration profiles during hot‐filament‐assisted chemical‐vapor deposition (HFCVD) of …

Hydrogen radical concentrations traveling under flowing gas conditions through tubes of
different materials were measured using a dual thermocouple probe. The source of the …