BACKGROUND The manufacture of a variety of products now requires the cost-effective
production of very small structures and fea tures, eg, structures and features having a …

438/493: 506/23 Th ti ti id thods and Svstems for dis See application file for complete search
history. epresent 1nvenuon prov1des meunods and systems Ior d1S cretized, combinatorial …

An integrated processing tool is described comprising a full wafer processing module and a
combinatorial processing module. Chemicals for use in the combinatorial processing …

US PATENT DOCUMENTS 4,743,954 A 5, 1988 Brown 5,356,756 A 10, 1994 Cavicchi et al.
5,603,351 A 2f1997 Cherukuri et al. 5,985,356 A 11/1999 Schultz et al. 6,004,617 A 12/1999 …

(57) ABSTRACT A nanowire array is described herein. The nanowire array comprises a
substrate and a plurality of nanowires extending essentially vertically from the substrate; …

In one aspect, described herein are field effect chemical sensor devices useful for chemical
and/or biochemical sensing. Also provided herein are methods for single molecule …

Substrate processing systems and methods are described for processing substrates. The
processing includes transferring electronic identification (ID) information of one or more …

Described herein is a device comprising: a Substrate; one or more of a nanostructure
extending essentially perpendicu larly from the substrate; wherein the nanostructure …

An array of vertically stacked tiers of non-volatile cross point memory cells includes a
plurality of horizontally oriented word lines within individual tiers of memory cells. A plurality …

Systems and methods for molecular self-assembly are pro vided. The molecular self-
assembly receives a substrate that includes one or more regions of dielectric material. A …