This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-
electro-mechanical systems) fabrication technologies and enabled micro devices of various …

In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

This work presents an extensive study on the temperature coefficient of frequency (TCF) for
thin-film lithium niobate (LiNbO 3) resonators. To capture the temperature-frequency …

An analytical model is proposed for thermoelastic damping in the out-of-plane vibration of a
microring resonator with rectangular cross-section. Although thermoelastic damping in the in …

An MEMS resonant accelerometer is a temperature-sensitive device because temperature
change affects the intrinsic resonant frequency of the inner silicon beam. Most classic …

This paper introduces the comprehensive design concepts, procedure, and post-process
flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …

Thermoelastic dissipation or thermoelastic damping (TED) can restrict the quality factor of
micro/nanoring resonators seriously. This paper employs the non-Fourier model of Guyer …

As an alternative to SU-8 soft lithography, a new silicon mold process of fabricating PDMS
microchannel chips was proposed. A picosecond laser is used to cut through a 550 μm thick …

We propose a novel filter coupling scheme, which combines the merits of mechanically and
electrically coupled methods to enable a well-defined narrow bandwidth and a decent …

Acoustic radiation forces and torques are very effective in manipulating micron-sized objects
such as cells, droplets, particles, and organisms. In this work, we present analysis of …