Compared to conventional sensors, resonant-based sensors output frequency signals
instead of voltage signals and therefore have greater advantages in terms of accuracy, noise …

This paper reports an acoustic microelectromechanical system (MEMS) resonator structure
that features dual-resonant response at 180 and 500 MHz. The MEMS structure uses …

This paper presents a capacitive bulk mode resonator operating in Lamé mode, where the
motional resistance and temperature stability are enhanced by implementing a set of …

In this paper, we demonstrate the thermal effects of micro-ovenized clocks embedded in the
device layer of a vacuum sealed MEMS inertial measurement unit. We demonstrate a novel …

Temperature-induced frequency drift is a major concern in the MEMS resonators field for
time referencing or sensing applications. Besides the paramount advantages regarding SoC …

The importance of micromachined resonators continues to grow as they become
increasingly prevalent in a wide range of applications, from wearable devices to more …

Digital circuits and systems have been a part of modern life, whether in the form of digital
signal processors, processors, or application-specific integrated circuits. The considered …