Development of mems airflow volumetric flow sensing system with single piezoelectric micromachined ultrasonic transducer (pmut) array

X Xiu, H Yang, M Ji, H Lv, S Zhang - Micromachines, 2022 - mdpi.com
Compared to conventional ultrasonic flowmeters using multiple transducers, this paper
reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to …

A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects

L Liu, W Ji, Z Xing, X Sun, Y Chen… - … of Micromechanics and …, 2021 - iopscience.iop.org
This paper presents a dual-frequency piezoelectric micromachined ultrasonic transducer
(PMUT) line array with low crosstalk level, which was fabricated on silicon-on-insulator (SOI) …

Sensitivity—bandwidth optimization of PMUT with acoustical matching using finite element method

LM He, WJ Xu, Y Wang, J Zhou, JY Ren - Sensors, 2022 - mdpi.com
A new model in finite element method to study round-trip performance of piezoelectric
micromachined ultrasonic transducers (pMUTs) is established. Most studies on the …

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

OMO Abdalla, G Massimino, C D'Argenzio… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
This study provides a comprehensive characterization of a 4 4 piezoelectric micromachined
ultrasonic transducer (PMUT) array suited for in-air applications. Crosstalk can be viewed as …

Numerical simulation of crosstalk effects in PMUT arrays

OMO Abdalla, G Massimino… - … and Multi-Physics …, 2023 - ieeexplore.ieee.org
The significant negative influence of crosstalk among the diaphragms of Piezoelectric
Micromachined Ultrasonic Transducers (PMUT) drives its mechanical and acoustic behavior …

Multielement ring array based on minute size PMUTs for high acoustic pressure and tunable focus depth

E Ledesma, I Zamora, A Uranga, N Barniol - Sensors, 2021 - mdpi.com
This paper presents a multielement annular ring ultrasound transducer formed by individual
high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision …

Crosstalk effects in PMUT arrays

OMO Abdalla, G Massimino… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
This paper investigates the effect of crosstalk among the diaphragms of a 4 x 4 Piezoelectric
Micromachined Ultrasonic Transducers (PMUT) array, designed for in-air applications, on its …

Crosstalk effects in matrix of PZT sensors for SHM applications based on the electromechanical impedance principle

J Vieira Filho, MRR CADALSO… - STRUCTURAL …, 2023 - dpi-proceedings.com
Using PZT transducers leads to different structural health monitoring techniques, such as
those based on Frequency Response Function and Lamb Waves. When two or more PZT …

Development of backing piezoelectric micromachined ultrasonic transducer (B-PMUT) 2D array

XB Wang, YC Ma, LM He, Y Wang… - 2021 IEEE …, 2021 - ieeexplore.ieee.org
To improve the problem of narrow bandwidth and large crosstalk in high-frequency PMUT
array, a PMUT device with a damping backing structure (B-PMUT) is proposed and realized …

Round-Trip Sensitivity-Bandwidth Optimization and Characterization of High-Frequency PMUTs

L He, N Lv, W Xu, Y Wang, J Ren - 2023 IEEE International …, 2023 - ieeexplore.ieee.org
Piezoelectric micromachined ultrasonic transducers (PMUTs) are fabricated with Micro-
Electro-Mechanical Systems (MEMS) processes. They have advantages such as high …