Large area nanoimprint by substrate conformal imprint lithography (SCIL)

MA Verschuuren, M Megens, Y Ni… - Advanced Optical …, 2017 - degruyter.com
Releasing the potential of advanced material properties by controlled structuring materials
on sub-100-nm length scales for applications such as integrated circuits, nano …

Role of nanoimprint lithography for strongly miniaturized optical spectrometers

H Hillmer, C Woidt, A Istock, A Kobylinskiy, DT Nguyen… - Nanomaterials, 2021 - mdpi.com
Optical spectrometers and sensors have gained enormous importance in metrology and
information technology, frequently involving the question of size, resolution, sensitivity …

Nanoimprint lithography: 2D or not 2D? A review

H Schift - Applied Physics A, 2015 - Springer
Nanoimprint lithography (NIL) is more than a planar high-end technology for the patterning
of wafer-like substrates. It is essentially a 3D process, because it replicates various stamp …

AFM-Based nanofabrication and quality inspection of three-dimensional nanotemplates for soft lithography

J Deng, L Jiang, B Si, H Zhou, J Dong… - Journal of Manufacturing …, 2021 - Elsevier
Soft lithography is one of the most promising nanofabrication technologies for scalable
nanomanufacturing. It uses flexible molds or stamps to fabricate extremely high-resolution …

Development and characterization of ultrasonic vibration assisted nanomachining process for three-dimensional nanofabrication

J Deng, J Dong, PH Cohen - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
This paper develops and characterizes a three-dimensional (3-D) nanofabrication process
using ultrasonic vibration assisted nanomachining based on an atomic force microscope …

Miniaturized interferometric sensors with spectral tunability for optical fiber technology—A comparison of size requirements, performance, and new concepts

H Hillmer, C Woidt, A Kobylinskiy, M Kraus, A Istock… - Photonics, 2021 - mdpi.com
Optical interferometric sensors have acquired significant importance in metrology and
information technology, especially in terms of their potential application in launching size …

High resolution on-chip optical filter array based on double subwavelength grating reflectors

Y Horie, A Arbabi, S Han, A Faraon - Optics Express, 2015 - opg.optica.org
An optical filter array consisting of vertical narrow-band Fabry-Pérot (FP) resonators formed
by two highly reflective high contrast subwavelength grating mirrors is reported. The filters …

Low-cost micro-spectrometer based on a nano-imprint and spectral-feature reconstruction algorithm

Q Liu, Z Xuan, Z Wang, X Zhao, Z Yin, C Li, G Chen… - Optics Letters, 2022 - opg.optica.org
Reconstructive micro-spectrometers have shown great potential in many fields such as
medicine, agriculture, and astronomy. However, the performance of these spectrometers is …

Electrowetting assisted air detrapping in transfer micromolding for difficult-to-mold microstructures

X Li, H Tian, C Wang, X Li, J Shao… - ACS Applied Materials …, 2014 - ACS Publications
As a widely applicable process for fabricating micro-or nanostructures, micromolding in
atmosphere would require the removal or minimization of air-trapping in mold cavities so as …

Multiphoton microfabrication and micropatternining (MMM)-based screening of multiplex cell niche factors for phenotype maintenance-Bovine nucleus pulposus cell …

CH Yip, AD Chen, YH Wong, BP Chan - Biomaterials, 2022 - Elsevier
Upon monolayer cultures on flat and rigid plastic dishes, many cells de-differentiate and lose
their native phenotype. Technologies able to identify and reconstitute the cell niche factors …