Optical scatterometry is the workhorse technique for in-line manufacturing process control in
the semiconductor industry. However, as manufacturing processes develop, traditional …

The spatial and compositional complexity of 3D structures employed in today's
nanotechnologies has developed to a level at which the requirements for process …

In wafer metrology, the knowledge of the photomask together with the deposition process
only reveals the approximate geometry and material properties of the structures on a wafer …

Parameter reconstructions are indispensable in metrology. Here, the objective is to explain
K experimental measurements by fitting to them a parameterized model of the measurement …

The numerical modeling of cardiac electrophysiology has reached a mature and advanced
state that allows for quantitative modeling of many clinically relevant processes. As a result …

Parameter reconstruction is a common problem in optical nano metrology. It generally
involves a set of measurements, to which one attempts to fit a numerical model of the …

PyThia is a Python package for quantifying uncertainties by computing polynomial chaos
surrogates for computationally expensive parametric models (eg, parametric partial …

In this work a general approach to compute a compressed representation of the exponential
exp (h) of a high-dimensional function h is presented. Such exponential functions play an …

Optical scattering measurement is one of the most commonly used methods for non-contact
online measurement of film properties in industrial film manufacturing. Terahertz photons …

Diese Dissertation beschäftigt sich mit der Kombination aus verlässlicher Fehlerkontrolle
und datenbasierter Approximation um nicht-intrusive und zuverlässige Algorithmen zur …