State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review

V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

Improving sensitivity of resonant sensor systems through strong mechanical coupling

MS Hajhashemi, A Rasouli… - Journal of …, 2015 - ieeexplore.ieee.org
This paper reports on the first use of strongly coupled microresonators to improve the
sensitivity of resonant sensing systems. To date, the research on coupled resonant sensors …

Visualization of geometric manufacturing errors in a 3-DOF mode localized structure for high-accuracy mass sensing

H Cheng, Y Zhang, DF Wang, S Liu, D Zhou… - … Systems and Signal …, 2024 - Elsevier
A visualization scheme of geometric manufacturing errors is proposed in coupled
resonators. The basic idea is to determine manufacturing errors on each resonator by …

A simple technique to readout and characterize coupled MEMS resonators

G Tao, B Choubey - Journal of Microelectromechanical …, 2016 - ieeexplore.ieee.org
Highly sensitive microelectromechanical system (MEMS) resonators have been used for
extensive applications such as mass sensing. However, these arrays are prone to process …

Sensitivity and error analysis of a coupled micro-resonator array for ultra-sensitive mass detection using matrix perturbation theory

A Chatterjee - IEEE Sensors Journal, 2015 - ieeexplore.ieee.org
A coupled micro-resonator array of cantilevers presents a cyclic symmetrical eigen system,
which exhibits a characteristic modal spectrum. However, addition of even a small mass can …

Noise sensitivity of a mass detection method using vibration modes of coupled microcantilever arrays

TJ Ryan, JA Judge, JF Vignola, AA Glean - Applied Physics Letters, 2012 - pubs.aip.org
Numerical simulation is used to explore the sensitivity to measurement noise of a mass
detection approach that uses eigenmodes of an array of nominally identical micro-or …

Characterization of disturbances in systems of coupled micro-resonator arrays

MS Hajhashemi, B Bahreyni - IEEE Sensors Journal, 2012 - ieeexplore.ieee.org
This paper describes a method for processing signals from an array of coupled resonators to
detect perturbations due to external stimuli. This method is based on simultaneous …

Determination of the anisotropy of young's modulus using a coupled microcantilever array

B Choubey, EJ Boyd, I Armstrong… - Journal of …, 2012 - ieeexplore.ieee.org
This paper reports a simple technique to measure the anisotropy of the Young's modulus of
MEMS materials using coupled cantilevers. The technique is demonstrated in single-crystal …

On characterizing microelectromechanical processes using coupled resonators

B Choubey, S Collins, M Ward - Journal of …, 2012 - ieeexplore.ieee.org
In this paper, a simple method of measuring process-induced variations is proposed using a
chain of nominally identical microelectromechanical resonators. The method is based upon …

Remote sensing in hybridized arrays of nanostrings

TS Biswas, J Xu, X Rojas, C Doolin, A Suhel… - Nano …, 2014 - ACS Publications
We study high-Q nanostrings that are joined end-to-end to form coupled linear arrays.
Whereas isolated individual resonators exhibit sinusoidal vibrational modes with an almost …