RF MEMS electrostatically actuated tunable capacitors and their applications: a review
This paper reviews the recent developments of micro-electromechanical system (MEMS)
based electrostatically actuated tunable capacitors. MEMS based tunable capacitors …
based electrostatically actuated tunable capacitors. MEMS based tunable capacitors …
Design and simulation of a wide-range variable MEMS capacitor using electrostatic and piezoelectric actuators
In this paper, we present a new structure of a micromachined tunable capacitor using a
combination of piezoelectric and electrostatic parallel-plate actuators. Electrostatic parallel …
combination of piezoelectric and electrostatic parallel-plate actuators. Electrostatic parallel …
High-power MEMS varactors and impedance tuners for millimeter-wave applications
Y Lu, LPB Katehi, D Peroulis - IEEE Transactions on Microwave …, 2005 - ieeexplore.ieee.org
A high-power contactless RF microelectromechanical system (MEMS) varactor and an
impedance tuner that utilizes this varactor and is simultaneously optimized for maximum …
impedance tuner that utilizes this varactor and is simultaneously optimized for maximum …
Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor
In wireless communication systems, passive elements including tunable capacitors and
inductors often need high quality factor (Q-factor). In this paper, we present the design and …
inductors often need high quality factor (Q-factor). In this paper, we present the design and …
High-Q millimeter-wave MEMS varactors: extended tuning range and discrete-position designs
This paper presents the design, fabrication and measurement of two high-Q micro-electro-
mechanical (MEMS) varactors suitable for 20-60 GHz applications. The varactors are …
mechanical (MEMS) varactors suitable for 20-60 GHz applications. The varactors are …
Electrostatically-tunable analog RF MEMS varactors with measured capacitance range of 300%
D Peroulis, LPB Katehi - IEEE MTT-S International Microwave …, 2003 - ieeexplore.ieee.org
This paper reports on the design, fabrication, and testing of a novel analog MEMS varactor
with measured tuning range of 300%. The proposed electrostatically actuated varactor is …
with measured tuning range of 300%. The proposed electrostatically actuated varactor is …
A novel MEMS-tunable hairpin line filter on silicon substrate
A Ocera, P Farinelli, P Mezzanotte… - 2006 European …, 2006 - ieeexplore.ieee.org
In this paper a novel MEMS-tunable hairpin line filter is presented. The circuit has been
realized on a 525 mum high resistivity silicon substrate using a well established …
realized on a 525 mum high resistivity silicon substrate using a well established …
A MEMS-reconfigurable power divider on high resistivity silicon substrate
A Ocera, P Farinelli, F Cherubini… - 2007 IEEE/MTT-S …, 2007 - ieeexplore.ieee.org
This paper presents a MEMS-reconfigurable power divider on high resistivity silicon
substrate with variable power ratio. The circuit is based on two cascaded hybrid couplers …
substrate with variable power ratio. The circuit is based on two cascaded hybrid couplers …
Electrostatic comb-drive actuator with high in-plane translational velocity
YM Eltagoury, M Soliman, YM Sabry, MJ Alotaibi… - Micromachines, 2016 - mdpi.com
This work reports the design and opto-mechanical characterization of high velocity comb-
drive actuators producing in-plane motion and fabricated using the technology of deep …
drive actuators producing in-plane motion and fabricated using the technology of deep …
Novel RF MEMS switch and packaging concepts
J Oberhammer - 2004 - diva-portal.org
Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized
devices intended to switch, modulate, filter or tune electrical signals from DC to microwave …
devices intended to switch, modulate, filter or tune electrical signals from DC to microwave …