On the mechanical properties of ultrathin titanium nitride films under different gas ratios of PVD process

YZ Lai, W Fang - Microelectronic Engineering, 2025 - Elsevier
Abstract Titanium Nitride (TiN x) thin film has numerous applications in semiconductors,
nanotechnology, and various aspects of daily life. This study presents an approach to …

[HTML][HTML] Soft g-C3N4 phases in amorphous CNx coatings

AS Bhattacharyya - Chemical Physics Impact, 2024 - Elsevier
Abstract Carbon-Nitride (CNx) coatings deposited using plasma-based physical and
chemical vapor deposition led to the formation of gC 3 N 4 phase in crystalline and mainly …

[PDF][PDF] SILICON OXYCARBONIRIDE BASED SPUTTERED HARD FILMS

AS Bhattacharyya - researchgate.net
Abstract Silicon Oxynitride (Si-ON) is basically a polymer derived ceramic (PDC) having
good fracture toughness and high temperature stability used in aerospace, sensing …

Cracks at shallow nanoindentation depths in titanium diboride hard thin coatings used in AFM nanoindentation

AS Bhattacharyya - Metallurgical Research & …, 2024 - metallurgical-research.org
Hard coatings like Titanium diboride (TiB 2) on silicon substrates which are used for
interconnects. micro-electro-mechanical devices and metallurgical protective coatings were …

[PDF][PDF] Fracture analysis of Si-CN coatings using different methods and its effect on electrical conduction

AS Bhattacharyya, K Bhattacharyya - researchgate.net
The ternary nanocomposite comprising of a mixture of different phases viz., SiC, Si-N, CN
and different hybridized carbon grown over an amorphous Si-CN phase has also been …

Nano mechanics in multicomponent hard coatings for MEMS cantilevers

AS BHATTACHARYYA - 2024 - researchsquare.com
Abstract Ti-B-Si-CBN/Si coatings are VLSI compatible at a cheaper rate. These multi-
component nanocomposite coating comprising of a mixture of different phases viz., TiN, TiB …

[PDF][PDF] Chemical Physics Impact

AS Bhattacharyya - Carbon - researchgate.net
ABSTRACT Carbon-Nitride (CNx) coatings deposited using plasma-based physical and
chemical vapor deposition led to the formation of gC 3N4 phase in crystalline and mainly …

Localized carbon concentration gradients affecting nanocrystalline growth in Si-CN films

AS Bhattacharyya, A Kritivardhan - Authorea Preprints, 2024 - advance.sagepub.com
RESULTS & DISCUSSIONS A TEM image of Si-CN film growth process has been shown in
Fig 1 (a)[14]. The atomic clustering due to localized carbon concentration gradients can be …

[PDF][PDF] TITANIA-CARBON BASED NANOCOMPOSITES UNDER PDC REINFORCEMENTS

AS Bhattacharyya - researchgate.net
Titania (TiO2) having an enormous technological was blended with carbon (diamond) to
improve its thermos-mechanical properties. The process of blending polymer derived …

[PDF][PDF] Si-BCN PDCs: an overview

AS Bhattacharyya - researchgate.net
Si-BCN PDCs: an overview Page 1 Si-BCN PDCs: an overview AS Bhattacharyya1, 2 Dept. of
Metallurgical and Materials Engineering1 & Centre of Excellence in Green and Efficient Energy …