Control of Fab Lifters via Deep Reinforcement Learning: A Semi-MDP Approach
In multi-floor fabrication facilities (fabs), lifters' efficient transportation of resources is crucial
for the overall productivity of the modern semiconductor industry. Unfortunately, most of the …
for the overall productivity of the modern semiconductor industry. Unfortunately, most of the …
[HTML][HTML] Optimizing production efficiency in semiconductor enterprises by an improve and optimized biogeographical optimization algorithm based on three-layer …
J Liu - Intelligent Systems with Applications, 2024 - Elsevier
Aiming at the problem of low production efficiency and inability to fully unleash production
capacity in current semiconductor enterprises, a production efficiency optimization model for …
capacity in current semiconductor enterprises, a production efficiency optimization model for …
An MDP-based lifter assignment algorithm for inter-floor transportation in semiconductor fabrication
As semiconductor device geometries continue to shrink, the semiconductor manufacturing
process becomes increasingly complex. This usually results in unbalanced utilization of …
process becomes increasingly complex. This usually results in unbalanced utilization of …