Atomic and close-to-atomic scale manufacturing: a review on atomic layer removal methods using atomic force microscopy

PT Mathew, BJ Rodriguez, F Fang - Nanomanufacturing and Metrology, 2020 - Springer
Manufacturing at the atomic scale is the next generation of the industrial revolution. Atomic
and close-to-atomic scale manufacturing (ACSM) helps to achieve this. Atomic force …

Advancements and challenges in development of atomic force microscopy for nanofabrication

AA Tseng - Nano Today, 2011 - Elsevier
In the past decade, atomic force microscopy (AFM) has become a powerful technology for
nanofabrication due to its low cost, simplicity in operation, and unique atomic-level …

Modelling and simulation of manufacturing process chains

SM Afazov - CIRP Journal of Manufacturing Science and …, 2013 - Elsevier
Modelling and simulation of manufacturing process chains are important for decreasing the
defects induced by the manufacturing processes and increasing the life of the components …

Removing material using atomic force microscopy with single‐and multiple‐tip sources

AA Tseng - Small, 2011 - Wiley Online Library
Atomic force microscopy (AFM) has been an effective material removing tool for fabricating
various nanostructures because of its sub‐nanometer precision and simplicity in operation …

Molecular dynamics and experimental study on comparison between static and dynamic ploughing lithography of single crystal copper

G Xiao, Y He, Y Geng, Y Yan, M Ren - Applied Surface Science, 2019 - Elsevier
Dynamic ploughing lithography based on atomic force microscope (AFM) is a promising
technique for fabrication of nano structures and devices. This study investigates the material …

Scratch on polymer materials using AFM tip-based approach: A review

Y Yan, S Chang, T Wang, Y Geng - Polymers, 2019 - mdpi.com
As a brand new nanomachining method, the tip-based nanomachining/nanoscratching
(TBN) method has exhibited a powerful ability at machining on polymer materials and …

Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist

Y Geng, Y Yan, Y Zhuang, Z Hu - Applied Surface Science, 2015 - Elsevier
This study proposes two atomic force microscope (AFM) tip-based direct nanoscratching
methods including single-pass scratching and multi-pass scratching compared with a …

Direct UV patterning of electronically active fullerene films

J Wang, C Larsen, T Wågberg… - Advanced Functional …, 2011 - Wiley Online Library
We utilize UV light for the attainment of high‐resolution, electronically active patterns in [6, 6]‐
phenyl C61‐butyric acid methyl ester (PCBM) films. The patterns are created by directly …

Modelling the surface generation process during AFM probe-based machining: simulation and experimental validation

A Elkaseer, EB Brousseau - Surface Topography: Metrology and …, 2013 - iopscience.iop.org
The controlled removal of material conducted with the tip of an atomic force microscope
(AFM) probe is a technique that has started gaining increased attention in recent years …

Study of the control process and fabrication of microstructures using a tip-based force control system

J Zhang, Y Yan, Z Hu, X Zhao - Proceedings of the Institution …, 2018 - journals.sagepub.com
The atomic force microscopy tip-based nanomechanical machining method has already
been employed to machine different kinds of nanostructures with the control of the normal …