Varifocal MEMS mirrors for high-speed axial focus scanning: a review
Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …
Evaluation of Scanning Micromirror with Acoustic Cavity
The effect of the acoustic cavity for scanning micromirror have been evaluated. The
dimension of mirror is 2.8 mm square and the resonant frequency is about 19.5 kHz. The …
dimension of mirror is 2.8 mm square and the resonant frequency is about 19.5 kHz. The …