A review on in situ stiffness adjustment methods in MEMS

MLC De Laat, HHP Garza, JL Herder… - Journal of …, 2016 - iopscience.iop.org
In situ stiffness adjustment in microelectromechanical systems is used in a variety of
applications such as radio-frequency mechanical filters, energy harvesters, atomic force …

[HTML][HTML] Mode coupling and nonlinear resonances of MEMS arch resonators for bandpass filters

AZ Hajjaj, MA Hafiz, MI Younis - Scientific reports, 2017 - nature.com
We experimentally demonstrate an exploitation of the nonlinear softening, hardening, and
veering phenomena (near crossing), where the frequencies of two vibration modes get close …

Ultrawide frequency tuning of atomic layer van der Waals heterostructure electromechanical resonators

F Ye, A Islam, T Zhang, PXL Feng - Nano Letters, 2021 - ACS Publications
We report on the experimental demonstration of atomically thin molybdenum disulfide
(MoS2)–graphene van der Waals (vdW) heterostructure nanoelectromechanical resonators …

The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes

AZ Hajjaj, N Alcheikh, MI Younis - International Journal of Non-Linear …, 2017 - Elsevier
We investigate experimentally and analytically the effect of initial shapes, arc and cosine
wave, on the static and dynamic behavior of microelectromechanical systems (MEMS) arch …

Electromagnetic wave propagation in a rolled-up tubular microcavity

G Huang, Y Mei - Journal of Materials Chemistry C, 2017 - pubs.rsc.org
Strain-engineering of nanomembranes with pre-defined geometries leads to fabrication of
microtubular structures by lift-off technology, which provide tunable three-dimensional …

Highly tunable electrothermally and electrostatically actuated resonators

AZ Hajjaj, N Alcheikh, A Ramini… - Journal of …, 2016 - ieeexplore.ieee.org
This paper demonstrates experimentally, theoretically, and numerically for the first time, a
wide-range tunability of an in-plane clamped-clamped microbeam, bridge, and resonator …

[HTML][HTML] Electro-superlubric springs for continuously tunable resonators and oscillators

Z Wu, X Huang, X Xiang, Q Zheng - Communications Materials, 2021 - nature.com
Resonators and resonator-based oscillators are used in most electronics systems and they
are classified as either mechanical or electrical, with fixed or difficult-to-tune resonant …

Mechanical resonator with a spring-mass system comprising a phase-change material

JBC Engelen, MA Lantz, WW Koelmans - US Patent 9,584,092, 2017 - Google Patents
(57) ABSTRACT A mechanical resonator includes a spring-mass system, wherein the spring-
mass system comprises a phase-change material. The mechanical resonator typically …

Nanostrain resolution strain sensing by monocrystalline 3C-SiC on SOI electrostatic MEMS resonators

L Belsito, M Bosi, F Mancarella, M Ferri… - Journal of …, 2019 - ieeexplore.ieee.org
The paper reports on the fabrication and characterization of flexural resonators designed for
resonant strain sensing and manufactured using 2 μm thick monocrystalline 3C-SiC layers …

[HTML][HTML] Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

P Guzman, T Dinh, HP Phan, AP Joy, A Qamar… - Materials & Design, 2020 - Elsevier
Tuning the natural frequency of a resonator is an innovative approach for the
implementation of mechanical resonators in a broad range of fields such as timing …