Reactive plasmas are a well-known tool for material synthesis and surface modification.
They offer a unique combination of non-equilibrium electron and ion driven plasma …

Reactive plasmas are highly valued for their ability to produce large amounts of reactive
radicals and of energetic ions bombarding surrounding surfaces. The non-equilibrium …

We use a global (volume averaged) model to study the dissociation processes and the
presence of negative ions and metastable species in a low pressure high density O 2/Ar …

The effluent of a microscale atmospheric pressure plasma jet (μ-APPJ) operated in helium
with a small admixture of molecular oxygen (< 1.6%) has been analyzed by means of two …

The applicability of actinometry for measuring the absolute concentration of O, N and F
atoms in discharge plasma was studied. For this purpose, concentrations of these atoms …

Plasma polymerisation is a technologically important surface engineering process capable
of depositing ultra-thin functionalised films for a variety of purposes. It has many advantages …

We propose a model which describes the frequency shift (Δ ω SM) of the stretching mode
(SM) of Si H monohydrides (MH's) when incorporated in hydrogenated amorphous silicon …

Atmospheric pressure non-equilibrium plasmas (APPs) are effective source of radicals,
metastables and a variety of ions and photons, ranging into the vacuum UV spectral region …

Polycrystalline Si on SiO x passivating contacts enables some of the highest efficiency
single-junction Si photovoltaic devices, but the high-temperature firing process needed for …

Low-pressure RF plasma in fluorohydrocarbon gas mixtures is widely used in modern
microelectronics, eg in the etching of materials with a low dielectric constant (low-k) …