The focus of this study was to demonstrate the vapor-phase halogenation of Si (100) and
subsequently evaluate the inhibiting ability of the halogenated surfaces toward atomic layer …

Engineering the chemical environment of active metal phase plays vital role for the alkane
reforming, yet great challenges remain. Herein, ABC-type atomic layer deposition (ALD) with …

Self-aligned thin film patterning has become a critical technique for the manufacturing of
advanced semiconductor devices. The great benefit of the selfalignment is to reduce the …

The fabrication of 2D devices with micro/nano-scale features often rely on assembly from a
top-down perspective, where the design emphasis is on the removal of material to generate …

The semiconductor industry faces physical limitations due to its top-down manufacturing
processes. High cost of EUV equipment, time loss during tens or hundreds of …

The semiconductor industry faces physical limitations due to its top-down manufacturing
processes. High cost of EUV equipment, time loss during tens or hundreds of …