J Schwan, V Batori, S Ulrich, H Ehrhardt… - Journal of Applied …, 1998 - pubs.aip.org
Nitrogenated and hydrogenated amorphous carbon (aC: H: N) films have been deposited by
a plasma beam source using a gas mixture of C 2 H 2, Ar and N 2. The Ar/C 2 H 2 ratio is …