In this paper, a three-dimensional atomic force microscope (3-D AFM) for imaging of the
micro-and nanoscale sidewall structures is presented. The system mainly consists of two …

We proposed a novel atomic force microscopy (AFM) technique based on the orthogonal
cantilever probe (OCP) for measuring the sidewall of microstructure/nanostructure. The OCP …

When using dimensional measuring instruments it is assumed that there is a property of the
object, which we call surface, that is present before during and after the measurement, ie the …

Microstructure‐based function components are widely used in precision engineering.
Surface profile measurement is an essential tool to verify the manufacturing quality of …

This paper presents a new on-machine measuring system based on scanning tunneling
microscope principle, in order to meet the demand for precision form control of fabricated …

This study presents a micro-V-grooves dihedral measurement method using white light
interferometry on multiple reflection phenomena. When an optical instrument is used to …

This paper proposes an approach to measure double-sided near-right-angle structured
surfaces based on dual-probe wavelength scanning interferometry (DPWSI). The principle …

Because of the everlasting promotion of micro/nanofabrication techniques, the measurement
of the feature contour of micro/nanofabricated structures becomes an important issue …

Dynamic errors of the stylus‐based probing system seriously affect the measurement
accuracy in surface quality detection on microstructures. A method, which is focused on …

We report a method to measure critical dimensions of micro-and nanostructures using the
atomic force microscope (AFM) with an optical fiber probe (OFP). This method is capable of …