Volatile organic compounds (VOCs) have gained the biomedical community's attention
given their relevance in exhaled human breath analysis for noninvasive disease diagnosis …

A fully monolithic complimentary metal-oxide-semiconductor-microelectormechanical
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …

We report on the first experimental demonstration of five self-sustaining feedback oscillators
referenced to a single multimode resonator, using piezoelectric aluminum nitride on silicon …

The potential benefits of oscillator synchronization are receiving increased interest in the
resonant MEMS community, for clocking or sensing applications. In this paper, we explore …

This letter reports on the design and characterization of a dual-frequency oscillator that
consist of a reliable seesaw-shaped tungsten resonator integrated in the back end of line of …

In this work, we have explored the power handling and motional resistance for the MEMS
resonators fabricated using the Titanium-Nitride-Composite (TiN-C) platform on the CMOS …

CMOS-MEMS resonators have become a promising solution thanks to their miniaturization
and on-chip integration capabilities. However, using a CMOS technology to fabricate …

We study the nonlinear behavior of a microelectromechanical resonator implemented using
the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response …

This paper presents a proof of concept of a differential sensor based on the phase-difference
of two injection-locked MEMS resonators, strongly coupled through their actuation voltages …

This book will present the theoretical and technological elements of nanosystems. Among
the different topics discussed, the authors include the electromechanical properties of …