This work describes a method for measuring the average pore size and the determination of
the porosity of porous silicon (PSi) layers, which involves image processing of top-view SEM …

A new approach is presented to produce amorphous porous silicon coatings (a-pSi) with
closed porosity by magnetron sputtering of a silicon target. It is shown how the use of He as …

The phonon confinement model is often used to analyze Raman scattering band shapes of
porous silicon and hence to determine the size of crystallites embedded in the porous layer …

Silicon nanoporous pillar array (Si-NPA) is a micron-nanometer hierarchical structure which
might be used as functional substrates for constructing optoelectronic nanodevices. This …

“Black silicon” layers were formed by catalytic etching of Au/Si (100) wafers in HF− H 2 O 2−
H 2 O solutions at room temperature. The structural and optical properties of the catalytic …

Vertically well-aligned Si nanowire (SiNW) arrays were synthesized by catalytic etching in a
newly developed etchant system Ag 2 SO 4− HF− H 2 O. The structural and optical …

The thermoelectric properties of nanostructured silicon have attracted significant attention in
recent work. The objective is to reduce thermal conductivity through the introduction of …

An etching system NH 4 HF 2/H 2 O 2 was developed to fabricate porous columnar structure
on Si surfaces. The Pd catalyst was electroless-deposited on Si wafers in aqueous HF (5%) …

In last years, the research in porous silicon has become a growing field due to the many
possible applications such as solar cells [1], optoelectronics [2] and photonic devices [3]. We …

シリコン (Si) は地球上に大量に存在しており, 安価で安全な半導体材料として知られている. Si
は半導体工学においてとても重要な材料であり, 電子デバイスやオプトエレクトロニクスなどの様々 …