Miniaturized silicon thermal probes for plant's sap flow measurement, or micro sap flow
sensors, have advantages in minimum invasiveness, low power consumption, and fast …

We present a system-level model with an on-chip temperature compensation technique for a
CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses …

Flexible flow sensors show potential applications in aerospace, wearable devices,
biomedicine, and other fields. In this article, a flexible microelectromechanical system …

In this paper, a high-sensitivity digital flow meter, featuring a low-power Thermo-resistive
Micro Calorimetric Flow (TMCF) sensor fabricated by CMOS-MEMS technology, is presented …

This paper presents a micromachined thermal convective accelerometer with low power and
high reliability. This accelerometer comprises a heater and two thermistors. The central …

In this article, a novel approach has been presented to suppress the direction measurement
errors in mechanical wind sensors by optimizing the configuration of supporting beams. The …

The demand for flow sensors capable of reliable operation in high-temperature
environments is escalating across various sectors, including automotive, aerospace, oil …

System-level simulation with macromodel is an important way to help MEMS design and
optimization. The applications of traditional MEMS macromodels are confronted with the …

In this article, the fabrication and characterization of a 2-D micro-electromechanical system
(MEMS) thermal convective accelerometer are demonstrated. This sensor consists of a …

An RF resonator-based 3D-printed flow sensor has been developed to measure a wide
range of flow rates, making it suitable for industrial applications such as gas refineries. The …