Anisotropic cutting mechanisms on the surface quality in ultra-precision machining of R-plane sapphire

Y Wang, Z Liang, W Zhao, X Wang, H Wang - Applied Surface Science, 2023 - Elsevier
The machined surface-layer quality of sapphire is influenced by its anisotropic properties.
This work investigates the anisotropic cutting mechanisms on the surface quality of R-plane …

The role of AlN thickness in MOCVD growth of N-polar GaN

Y Li, X Hu, Y Song, Z Su, W Wang, H Jia… - Journal of Alloys and …, 2021 - Elsevier
The influence of the thickness of aluminum nitride (AlN) on the surface morphology,
crystalline quality, and polarity of N-polar gallium nitride (GaN) grown by metal organic …

Demonstration of AlGaN/GaN HEMTs on vicinal sapphire substrates with large misoriented angles

H Zhang, Y Sun, K Song, C Xing, L Yang… - Applied Physics …, 2021 - pubs.aip.org
In this work, the electrical characteristics of AlGaN/GaN high-electron-mobility transistors
(HEMTs) on vicinal c-plane sapphire substrates with different misoriented angles are …

Interfacial Vacancies in /(,)/ Heterostructures

V Prozheeva, I Makkonen, H Li, S Keller, UK Mishra… - Physical Review …, 2020 - APS
We show that N-polar Ga N/(Al, Ga) N/Ga N heterostructures exhibit significant N deficiency
at the bottom (Al, Ga) N/Ga N interface, and that these N vacancies are responsible for the …

MOVPE growth of AlN and AlGaN films on N-polar annealed and sputtered AlN templates

G Namikawa, K Shojiki, R Yoshida, R Kusuda… - Journal of Crystal …, 2023 - Elsevier
We performed metalorganic vapor phase epitaxy (MOVPE) growth of AlN (MOVPE-AlN) and
AlGaN films on N-polar face-to-face annealed and sputtered AlN templates (N-polar FFA Sp …

Growth of N‐Polar Aluminum Nitride on Vicinal Sapphire Substrates and Aluminum Nitride Bulk Substrates

T Isono, T Ito, R Sakamoto, Y Yao… - … status solidi (b), 2020 - Wiley Online Library
Herein, nitrogen‐polar (N‐polar,(000‐1)) aluminum nitride (AlN) is grown on sapphire
substrates with various misorientation angles through metal‐organic vapor phase epitaxy …

Effective Schottky Barrier Height Model for N‐Polar and Ga‐Polar GaN by Polarization‐Induced Surface Charges with Finite Thickness

T Suemitsu, I Makabe - physica status solidi (b), 2020 - Wiley Online Library
The nitrogen‐polar GaN material system is a promising candidate for high‐frequency
applications, such as those in the millimeter‐wave range. Schottky barrier height is one of …

Ultra-high silicon doped N-polar GaN contact layers grown by metal-organic chemical vapor deposition

N Hatui, A Krishna, H Li, C Gupta… - Semiconductor …, 2020 - iopscience.iop.org
We report thin, high quality n+ type doped N-polar GaN contact layers grown using metal-
organic chemical vapor deposition with carrier concentration as high as 3.5× 10 20 cm− 3 …

Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing

L Cao, X Zhou, Y Wang, Z Yang, D Chen, W Wei… - Micromachines, 2023 - mdpi.com
Single-crystal sapphire specimen (α-Al2O3) have been widely applied in the semiconductor
industry, microelectronics, and so on. In order to shorten the production time and improve …

Characteristics of AlGaN/GaN high electron mobility transistors on metallic substrate

M Zhao, X Tang, W Huo, L Han, Z Deng… - Chinese …, 2020 - iopscience.iop.org
We have successfully prepared GaN based high electron mobility transistors (HEMTs) on
metallic substrates transferred from silicon substrates by electroplating technique. GaN …