Approaches to sustainability in chemical mechanical polishing (CMP): a review

H Lee, H Kim, H Jeong - International Journal of Precision Engineering …, 2022 - Springer
Chemical mechanical polishing (CMP) is an essential planarization process for
semiconductor manufacturing. The application of CMP has been increasing in …

Nanobubble technologies offer opportunities to improve water treatment

AJ Atkinson, OG Apul, O Schneider… - Accounts of chemical …, 2019 - ACS Publications
Conspectus Since first hypothesizing the existence of nanobubbles (NBs) in 1994, the
empirical study of NB properties and commercialization of NB generators have rapidly …

Incidence of metal-based nanoparticles in the conventional wastewater treatment process

P Cervantes-Avilés, AA Keller - Water research, 2021 - Elsevier
Metal-based nanoparticles (NPs) can be found in wastewater streams, which are significant
pathways for the release of NPs to the environment. Determination of the NPs concentration …

Adsorptive removal of oil from water using SPIONs–chitosan nanocomposite: kinetics and process optimization

H Singh, A Jain, J Kaur, SK Arya, M Khatri - Applied Nanoscience, 2020 - Springer
Marine oil spills and petrochemical discharges occurring either naturally or deliberately can
have destructive impacts on environment and economy of a nation. Water bodies …

Integrated Membrane-adsorption system as a sustainable development approach for semiconductor-industry wastewater treatment

SI Sim, YH Teow - Materials Today: Proceedings, 2023 - Elsevier
Conventional coagulation and flocculation processes applied for semiconductor industry
wastewater treatment contributes to high operating cost due to the use of chemical …

Environmental aspects of planarization processes

DE Speed - Advances in chemical mechanical planarization (CMP), 2022 - Elsevier
This chapter describes the occurrence, behavior, and treatment of wastewater that is
produced by the Chemical Mechanical Planarization (CMP) process when it is used to …

Chitosan-polyglycidol complexes to coating iron oxide particles for dye adsorption

A Iovescu, G Stîngă, ME Maxim, M Gosecka… - Carbohydrate …, 2020 - Elsevier
The study sheds light on the interaction between chitosan (Ch) and polyglycidol (PGL) and
uses their interpolymer complex in hydrophilic coating of iron oxide particles (M). Preliminary …

Biodegradable Polymeric nanocomposites for wastewater treatment

MHA Elella, ES Goda, MA Gab-Allah, SE Hong… - … for environmental and …, 2022 - Springer
Safe drinking water is one of the fundamental necessities for all living being on the earth.
Ever-growing population, industrialization, water sources disorganization, and global …

Adsorption of iii/v ions (In (iii), Ga (iii) and As (v)) onto SiO 2, CeO 2 and Al 2 O 3 nanoparticles used in the semiconductor industry

X Bi, P Westerhoff - Environmental Science: Nano, 2016 - pubs.rsc.org
The semiconductor industry annually uses thousands of tons of nanoparticles (NPs) in
chemical mechanical polishing (CMP) processes. When III/V materials are processed with …

Physics Based Reliability Analysis of the Silicon Interconnect Fabric

N Shakoorzadeh Chase - 2021 - escholarship.org
Advanced packaging is being driven by the need for computing power, thus, the reliability of
these systems needs to be addressed. The wide range of organic and inorganic materials …