A thermal convection based micro-electromechanical accelerometer is a relatively new kind
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …

Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly
includes thermal accelerometers and fluid gyroscopes, which have now been developed …

Current sensor networks need to be improved and updated to satisfy new essential
requirements of the Internet of Things, where cutting-edge applications will appear. These …

We present a one-dimensional (1D) theoretical model for the design analysis of a micro
thermal convective accelerometer (MTCA). Systematical design analysis was conducted on …

In this paper, a new 3-axis micromachined convective accelerometer is designed using
restrictions of both 0.35 µm CMOS technology and front-side bulk micromachining (FSBM) …

We present an ambient temperature compensation method for micro thermal convective
accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) …

This paper reports on a bio-inspired angular accelerometer based on a two-mask
microfluidic process using a PDMS mold. The sensor is inspired by the semicircular canals …

In this paper, we report the details and findings of a study on tri-axis convective
accelerometer, which is designed with the closed-loop type heat source and thermal …

Abstract (DE) Strukturüberwachung und Condition Monitoring spielen in vielen Gebieten der
Technik eine große Rolle. Zur Überwachung von Leichtbaustrukturen aus faserverstärkten …

This paper reports on the design, simulation, fabrication and characterization of a bio-
inspired angular accelerometer. The sensor mimics the semicircular canals in mammalian …