Frequency response to stimuli applied to acoustic micro-electro-Mechanical Systems (MEMS) yield meaningful information of certain defects affecting such devices. This article …
G Hantos, G Simon… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
Most mobile phones today have capacitive micro-electro-mechanical systems (MEMSs) microphones that use either single or dual diaphragms. Methods to detect failures easily and …