T Oshima, Y Kato, N Kawano, A Kuramata… - Applied Physics …, 2017 - iopscience.iop.org
A β-(Al x Ga 1− x) 2 O 3: Si/Ga 2 O 3 modulation-doped structure was fabricated by direct β-
(Al x Ga 1− x) 2 O 3 epitaxial growth on a (010) β-Ga 2 O 3 substrate. Si on the order of 10 …