Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance
for advancing nanoscience and nanotechnology. While the capability of current …

With the recent advances in the field of nanotechnology, measurement and manipulation
requirements at the nanoscale have become more stringent than ever before. In atomic force …

In recent years, the scientific community's interest in nanoscience and nanotechnology
stems from the increasing capability to manipulate matter at the nanoscale. Nanotechnology …

A fundamental understanding and advancement of nanopatterning and nanometrology are
essential in the future development of nanotechnology, atomic scale manipulation, and …

Single-digit nanometer lithography is a basic requirement for beyond CMOS devices. To
address this lithography challenge, a variety of different lithographic methods were …

Computers and other electronic devices are an integral and ubiquitous part of the modern
world. One of the key drivers for the development, power, cost, and availability of these …

The routine “on demand” fabrication of features smaller than 10 nm opens up new
possibilities for the realization of many devices. Driven by the thermally actuated …

Ultrastable vapor-deposited glasses display uncommon material properties. Most
remarkably, upon heating they are believed to melt via a liquid front that originates at the …

The creation of highly efficient guiding patterns for the directed self-assembly of block
copolymers by resistless nanolithography using atomic force microscopy (AFM) is …

Scanning probe lithography (SPL) describes a group of patterning techniques, wherein
localized tip-sample interactions are utilized in order to directly or indirectly (via a resist film) …