Research toward small, autonomous, and mobile robots is inspired by both the insects we
see around us and numerous applications, from inspection of jet engines and civil …

The development of micro and nano electromechanical systems and achievement of higher
performances with increased quality and life time is confronted to searching and mastering …

Millimeter-sized electrostatic film actuators, inspired by the efficient spatial arrangement of
insect muscles, achieve a muscle-like power density (61 W kg− 1) and enable robotic …

Micro actuators are widely used in NEMS/MEMS for control and sensing. However, most are
designed with suspended beams anchored at fixed points, causing two main issues …

The fabrication and integration of microactuators with 3D micromechanisms are necessary
to develop microrobots with higher capability and complexity. In this work, a two-step …

This work presents the locomotion of a ground-based single-legged silicon robot. The robot
measures 5mm× 6mm× 0.5 mm and weighs 18mg. Fabricated in a siliconon-insulator (SOI) …

Implantable neuroelectronic interfaces have enabled breakthrough advances in the clinical
diagnosis and treatment of neurological disorders, as well as in fundamental studies of brain …

Compared with conventional piezoelectric inchworm actuators (PIAs), which rely on a
frictional mechanism to produce large stroke and force outputs, PIAs equipped with MEMS …

We design an insect-sized rolling microrobot driven by continuously rotating wheels. It
measures 18 mm× 8 mm× 8 mm. There are 2 versions of the robot-a 96 mg laser-powered …

Vacuum-sealed fully integrated diode and triode field emission arrays based on Ti Spindt-
type field emitters have been developed in a scalable, CMOS-compatible process directly on …