Global Environmental Microelectromechanical Systems Sensors: Advanced Weather Observation System.

Design, fabrication, and integration of piezoelectric MEMS devices for applications in wireless sensor network

J Lu, Y Zhang, T Itoh, R Maeda - 2011 Symposium on Design …, 2011 - ieeexplore.ieee.org
One of the competitive solutions to expand the function of microelectromechanical system
(MEMS) is the integration of piezoelectric lead zirconate titanate (PZT) thin films for device …
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