Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

This paper presents the impact of vibrational amplitude on the dynamic pull-in instability and
fundamental frequency of actuated microbeams by introducing the second order frequency …

The microelectromechanical system (MEMS) vibrating ring gyroscope (VRG) holds
significant promise for angle sensing applications, with its performance highly reliant on the …

This paper presents a high-precision method for identifying the unbalanced mass of a fused
silica hemispherical resonator and an ion-beam trimming process for removing defective …

We have fabricated polycrystalline diamond hemispheres by hot-filament CVD (HFCVD) in
spherical cavities wet-etched into a high temperature glass substrate CTE matched to …

This article presents a theoretical, numerical and experimental study of resonant structures
undergoing very large amplitude vibrations. The purpose of this work is to validate a model …

For applications requiring high performance angular rate measurements it is important to be
able to design MEMS rate sensors with high quality factors (Q). This paper considers ring …

Abstract The performance of Hemispherical Resonator Gyroscopes (HRG) is decided by the
mechanical resonator's Quality factor (Q factor). The Q factor is a measure of energy …

This paper presents a new asymptotic procedure to predict the nonlinear vibrational
behavior of micro-beams pre-deformed by an electric field. The nonlinear equation of motion …

Trimming of resonators is an important process to achieve mass balance of vibratory cupped
gyroscopes. Material removing via trimming grooves can eliminate frequency splits of the …