MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

HT Le, RI Haque, Z Ouyang, SW Lee, SI Fried… - Microsystems & …, 2021 - nature.com
MEMS inductors are used in a wide range of applications in micro-and nanotechnology,
including RF MEMS, sensors, power electronics, and Bio-MEMS. Fabrication technologies …

[PDF][PDF] On-chip spiral inductors for RF applications: An overview

J Chen, JJ Liou - JSTS: Journal of Semiconductor Technology and …, 2004 - koreascience.kr
Passive components are indispensable in the design and development of microchips for
high-frequency applications. Inductors in particular are used frequently in radio frequency …

Wireless energy transfer system

M Sun, S Hackworth, R Sclabassi, F Zhang… - US Patent …, 2013 - Google Patents
A wireless energy transfer system includes a first energy transfer unit having at least one
resonant frequency, a second energy transfer unit having the at least one resonant …

3-D-printed air-core inductors for high-frequency power converters

W Liang, L Raymond, J Rivas - IEEE Transactions on Power …, 2015 - ieeexplore.ieee.org
This paper presents the design, modeling, and characterization of 3-D-printed air-core
inductors for high-frequency power electronics circuits. The use of 3-D modeling techniques …

RF MEMS inductors and their applications—A review

OF Hikmat, MSM Ali - Journal of Microelectromechanical …, 2016 - ieeexplore.ieee.org
Inductors are primary elements in many radio frequency circuitries and devices. This review
gives a comprehensive survey on the developments and performances of fixed and variable …

Chip-scale coils for millimeter-sized bio-implants

P Feng, P Yeon, Y Cheng, M Ghovanloo… - IEEE transactions on …, 2018 - ieeexplore.ieee.org
Next generation implantable neural interfaces are targeting devices with mm-scale form
factors that are freely floating and completely wireless. Scalability to more recording (or …

Ultra-small, high-frequency and substrate-immune microtube inductors transformed from 2D to 3D

X Yu, W Huang, M Li, TM Comberiate, S Gong… - Scientific reports, 2015 - nature.com
Monolithic on-chip inductors are key passive devices in radio frequency integrated circuits
(RFICs). Currently, 70–80% of the on-wafer area of most RFIC chips is occupied by the …

Self‐folding metal origami

N Lazarus, GL Smith, MD Dickey - Advanced Intelligent …, 2019 - Wiley Online Library
Origami‐based techniques for creating 3D shapes from 2D patterns via folding have moved
from the domain of art to practical engineering. Flat sheets are an appealing starting material …

A tunable RF MEMS inductor on silicon incorporating an amorphous silicon bimorph in a low-temperature process

S Chang, S Sivoththaman - IEEE electron device letters, 2006 - ieeexplore.ieee.org
A novel tunable radio frequency microelectromechanical system inductor based on the
bimorph effect of an amorphous silicon (a-Si) and aluminum structural layer is presented …

Chip-last (RDL-first) fan-out panel-level packaging (FOPLP) for heterogeneous integration

JH Lau, CT Ko, CY Peng, KM Yang… - Journal of …, 2020 - meridian.allenpress.com
In this investigation, the chip-last, redistribution-layer (RDL)–first, fan-out panel-level
packaging (FOPLP) for heterogeneous integration is studied. Emphasis is placed on the …