The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

Graphene is the strongest material ever studied and can be an efficient substitute for silicon.
This six-volume handbook focuses on fabrication methods, nanostructure and atomic …

Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

Thermoelastic dissipation (TED) is analyzed for complex geometries of micromechanical
resonators, demonstrating the impact of resonator design (ie, slots machined into flexural …

We present a performance analysis of compact monolithic optomechanical inertial sensors
that describes their key fundamental limits and overall acceleration noise floor. Performance …

In this paper, the performance of 6.35 MHz Lamé-mode square resonators with different
dimensions of straight-beam anchor supports is presented, with quality factor values …

This paper presents a comprehensive analysis of support loss, the dominant loss
mechanism, in center-supported micromechanical disk resonators operating in their radial …

This paper presents an analytical study on thermoelastic damping (TED) in the contour-
mode vibrations of micro-and nano-electromechanical circular thin-plate resonators. Instead …

In this paper, a thermal-energy method is presented for calculating thermoelastic damping in
micromechanical resonators. In this method, thermoelastic damping is interpreted as the …

Piezoelectrically actuated and sensed microscale resonators have been widely studied for
filtering, communication and sensing applications. In this effort, to characterize these …