392,650 A 11, 1888 Watrous 4,898,031 A 2f1990 Oikawa et al. 5,203,208 A 4, 1993
Bernstein 5,226,321 A 7, 1993 Varnham et al. 5,421,312 A 6, 1995 Dawson 5,578.976 A …

A micromachined gyroscope has first and second coplanar bodies suspended over a
substrate and movable in their plane relative to the substrate. The first body is dithered along …

4,665,610 A 5/1987 Barth 4,674,319 A 6/1987 Muller et al. 4,766,666 A 8/1988 Sugiyama et
al. 4,849,071 A 7/1989 Evans et al. 4.945, 769 A 8/1990 Sidner et al. 4,990.462 A 2/1991 …

An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a
first driving movement along a first axis upon biasing of an assembly of driving electrodes …

Embodiments of the present invention are directed to apparatuses and methods of making a
micromachined resonator gyroscope, eg a disc resonator gyro (DRG), including one or more …

4,665,610 A 5, 1987 Barth 4,674,319 A 6, 1987 Muller et al. 4,766,666 A 8/1988 Sugiyama
et al. 4,849,071 A 7, 1989 Evans et al. 4,945,769 A 8, 1990 Sidner et al. 4,990.462 A 2/1991 …

There are many inventions described and illustrated herein. In one aspect, the present
invention is directed to a MEMS device, and technique of fabricating or manufacturing a …

US7102467B2 - Method for adjusting the frequency of a MEMS resonator - Google Patents
US7102467B2 - Method for adjusting the frequency of a MEMS resonator - Google Patents …

20a (current) perature sensing elements. In another aspect, the present invention is directed
to fabricate, manufacture, provide and/or control microelectromechanical resonators having …

A micromachined gyroscope has first and second coplanar bodies suspended over a
substrate and movable in their plane relative to the substrate. The first body is dithered along …