Integration of edge-emitting quantum dot lasers with different waveguide platforms using micro-transfer printing
O-band InAs/GaAs Quantum Dot edge-emitting lasers are integrated onto a number of
waveguiding platforms using micro-transfer printing. These are deep recesses in 220 nm Si …
waveguiding platforms using micro-transfer printing. These are deep recesses in 220 nm Si …
Advanced Ultrathin Spray Coating Process Technology for Heterogeneous Integration Applications
J Rimböck, S Ertl, P Ramaswamy… - 2024 IEEE 10th …, 2024 - ieeexplore.ieee.org
In this work the spray coating deposition of thin and ultrathin homogeneous layers of
Divinylsiloxane-bis-benzocyclobutene (DVS-BCB or BCB) is presented. Film thicknesses …
Divinylsiloxane-bis-benzocyclobutene (DVS-BCB or BCB) is presented. Film thicknesses …