Presents the mathematical framework, technical language, and control systems know-how
needed to design, develop, and instrument micro-scale whole-angle gyroscopes This …

Long-term gyroscope drift can be effectively removed by employing simultaneous on-chip
stress and temperature compensation. Stress effects are significant and their inclusion …

This paper proposes and verifies a structure for the isolation of packaging stress in silicon-
on-insulator-based microelectromechanical systems devices. The packaging-stress isolation …

This research introduces a closed-loop method to improve the zero-rate output (ZRO)
stability of amplitude-modulated (AM) capacitive MEMS gyroscopes, even in absence of …

In this paper, we investigated the method of automatic matching of the resonant frequencies
for the decoupled dual-mass-axis silicon micro-gyroscopes. The structure of the studied …

This Ph. D. dissertation reports novel fabrication processes and architectures for
implementation of Rate Integrating Gyroscopes at micro-scale. Majority of the focus is …

The micro-gyroscope performance has improved throughout the years as a result of
extensive research, and advancements in fabrication technologies and readout electronics …

In this paper, we propose a packaging stress isolation structure for the silicon-on-insulator
(SOI) based microelectromechanical systems (MEMS) gyroscopes. The structure is …

Compensating the effects of external stress on a three-fold symmetric mode-matched z-axis
silicon-on-insulator (SOI) MEMS gyroscope is shown to reduce long term drift for the first …

MEMS technology has enabled substantial expansion of the inertial sensor market by
decreasing power consumption, size, and cost of inertial sensors. Furthermore, with …