Simulation of Surface Acoustic Wave Torque Sensors Using Coupling of Mode Analysis
C Jiang, H Xie, X Cao, L Tang… - 2024 IEEE MTT-S …, 2024 - ieeexplore.ieee.org
In this work, a simulation scheme using coupling-of-mode (COM) analysis for surface
acoustic wave (SAW) torque sensors is presented. To extract the COM parameters, the finite …
acoustic wave (SAW) torque sensors is presented. To extract the COM parameters, the finite …