Progress in semiconductor diamond photodetectors and MEMS sensors
M Liao - Functional Diamond, 2022 - Taylor & Francis
Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily
superior to those of the currently available wide-bandgap semiconductors for deep …
superior to those of the currently available wide-bandgap semiconductors for deep …
On‐chip diamond MEMS magnetic sensing through multifunctionalized magnetostrictive thin film
Electrically integrable, high‐sensitivity, and high‐reliability magnetic sensors are not yet
realized at high temperatures (500° C). In this study, an integrated on‐chip single‐crystal …
realized at high temperatures (500° C). In this study, an integrated on‐chip single‐crystal …
Effect of defects on Q factors of single-crystal diamond MEMS resonators
A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD)
microelectromechanical system (MEMS) for high-performance sensors. In this report, we …
microelectromechanical system (MEMS) for high-performance sensors. In this report, we …
Effect of deep-defects excitation on mechanical energy dissipation of single-crystal diamond
The ultrawide band gap of diamond distinguishes it from other semiconductors, in that all
known defects have deep energy levels that are less active at room temperature. Here, we …
known defects have deep energy levels that are less active at room temperature. Here, we …
Single-crystal diamond microelectromechanical resonator integrated with a magneto-strictive galfenol film for magnetic sensing
Single-crystal diamond (SCD) is a promising material for micro-electromechanical system
(MEMS) devices to achieve high performance and reliability due to its prominent mechanical …
(MEMS) devices to achieve high performance and reliability due to its prominent mechanical …
Ultrahigh performance on‐chip single crystal diamond NEMS/MEMS with electrically tailored self‐sensing enhancing actuation
All‐electrical nano‐electromechanical or micro‐electromechanical systems (NEMS/MEMS)
with integrated sensing and actuation are essential to fulfill the functionalities of single …
with integrated sensing and actuation are essential to fulfill the functionalities of single …
Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film
The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS)
through with a functional hetero-material provides the strategy to develop diamond MEMS …
through with a functional hetero-material provides the strategy to develop diamond MEMS …
Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers
The authors report the enhancement of the magnetic sensitivity of single-crystal diamond
(SCD) MEMS magnetic sensor, which is composed of a SCD cantilever integrated with a …
(SCD) MEMS magnetic sensor, which is composed of a SCD cantilever integrated with a …
Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS
Single-crystal diamond presents as an ideal semiconductor material for high-performance
and high-reliability MEMS devices, on account of its outstanding mechanical and physical …
and high-reliability MEMS devices, on account of its outstanding mechanical and physical …
Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor
The reduction of the energy dissipation induced by defects is essential to achieve the
ultrahigh-quality-factor mechanical resonators for the applications of quantum platform and …
ultrahigh-quality-factor mechanical resonators for the applications of quantum platform and …