With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

In this paper, we propose an analytical model that more accurately captures the electro-
mechanical behavior of laterally-vibrating extensional-mode thin-film piezoelectric-on-silicon …

This paper describes the use of the coupling beam in a pair of mechanically coupled Lamé
mode resonators to enhance electromechanical transduction by piezoresistive sensing …

To eliminate the electric feed-through introduced into the measurement of the micro-
resonator by the electrical scheme, an improved mixed-frequency-excitation (MFE) method …

A current conveyor-based analog electronic interface for differential capacitive sensors is
here shown. The read-out circuit that utilizes second generation Current Conveyors (CCIIs) …

This paper investigates the dependence of frequency stability over temperature on support
tethers in dual-beam piezoresistive length-extensional (LE) mode microelectromechanical …

In this chapter we present the theory of phononic crystal, classification of PnC according to
its physical nature, and phononic crystal (PnC) phenomena in locally resonant materials …

In the operation of MEMS gyroscopes, the feedthrough signal is inevitably introduced
through the feedthrough capacitance and significantly affects the performance of MEMS …

The integration of microelectromechanical devices (MEMS) with its driving integrated circuits
is fundamental to expanding the applications of both technologies. This integration puts …