The first 3-D-printed z-axis accelerometers with differential capacitive sensing
In this paper, additive manufacturing and wet metallization process are combined to
fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart …
fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart …
MEMS gyro array employing array signal processing for interference and outlier suppression
H Kamata, M Kimishima, T Sawada… - … on Inertial Sensors …, 2020 - ieeexplore.ieee.org
In this paper, two practical problems that cannot be ignored when forming compactly
integrated MEMS IMU array at low cost using Coriolis vibration type MEMS with low power …
integrated MEMS IMU array at low cost using Coriolis vibration type MEMS with low power …
A comparative study of acoustic isolation configurations for pMUT array-based applications
B Vysotskyi, R Haouari, B Weekers… - … and Multi-Physics …, 2021 - ieeexplore.ieee.org
This paper presents an overview of state-of-the-art acoustic isolation in MEMS and
compares several acoustic isolation techniques that can be applied to a pMUT array. To …
compares several acoustic isolation techniques that can be applied to a pMUT array. To …
Study of environmental survivability and stability of folded MEMS IMU
YW Lin, A Efimovskaya… - 2017 IEEE International …, 2017 - ieeexplore.ieee.org
This paper presents a study on the structural rigidity of an Inertial Measurement Unit (IMU)
implemented using the Folded MEMS approach. For such folded structures, environmental …
implemented using the Folded MEMS approach. For such folded structures, environmental …