A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-
electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs …

The micro-and nanoelectromechanical system (MEMS and NEMS) devices based on two-
dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to …

The intricate interdependency of device design and fabrication process complicates the
development of microelectromechanical systems (MEMS). Commercial pressure has …

In this article, an analytical method for calculating pull-in voltage is proposed. This method
can accurately predict pull-in voltage of clamped-free, clamped-clamped and curved micro …

Thick-film sacrificial layers based on inorganic materials have been used for the fabrication
of free-standing screen-printed films. A specific polymer ink based on a mixture of epoxy and …

The lifetime of micro electro–thermo–mechanical actuators with complex electro–thermo–
mechanical coupling mechanisms can be decreased significantly due to unexpected failure …

During their first fifty years, MEMS have been marked by long development cycles and
tremendous potential mixed with sporadic market success. Development times have been …

Micro-electro-mechanical systems are exposed to a variety of environmental stimuli, making
a prediction of operational reliability difficult. Here, we investigate environmental effects on …

The intricacy in the manufacturing of MEMS devices has resulted in decreasing parametric
yields. The problem of reduced parametric yield is increasing with the waning feature sizes …

Yield analysis of microsystems is increasingly becoming important due to their decreasing
feature sizes. Despite many ways and methods for statistical yield analysis, the contribution …