This review paper covers a topic of significant importance in micro-and nano-systems
development and manufacturing, specifically the residual stresses in deposited thin-film …

Silicon nitride (SiNx) and hydrogenated silicon nitride (SiNx: H) thin films enjoy widespread
scientific interest across multiple application fields. Exceptional combination of optical …

This article provides an overview of the state-of-the-art chemistry and processing
technologies for silicon nitride and silicon nitride-rich films, ie, silicon nitride with C inclusion …

We demonstrate a novel nanoreactor for performing atomic-resolution environmental
transmission electron microscopy (ETEM) of nanostructured materials during exposure to …

Over the years, the fundamentals of VLSI technology have evolved to include a wide range
of topics and a broad range of practices. To encompass such a vast amount of knowledge …

Silicon nitride (SiN) micro-and nanomechanical resonators have attracted a lot of attention in
various research fields due to their exceptionally high quality factors (Q s). Despite their …

This paper presents the design, fabrication and performance of an uncooled micro-
optomechanical infrared (IR) imaging system consisting of a focal-plane array (FPA) …

Mechanical characterization of atomic layer deposited (ALD) alumina (Al2O3) for use in
micro-and nano-electromechanical systems has been performed using several …

Where conventional testing and inspection techniques fail at the micro-scale, optical
techniques provide a fast, robust, and relatively inexpensive alternative for investigating the …

After discussion of the basic aspects of CVD and its reaction kinetics LPCVD and PECVD
will evolve as techniques commonly used at high temperature and lower temperature …